Highlights

Questionnaire for New Cleanroom Lab Users

Complete the form and click on the Submit button at the bottom of the page.
A confirmation screen will appear.

---

First Name*

M.I.

Last Name*

Principal Investigator*

Department/Organization*

Work Phone

E-mail*

Briefly describe the project(s) you will be working on in the Micro and Nanotechnology Laboratory and why the work needs to be done in a cleanroom environment.

What processes do you expect to perform in the lab? Check all that apply.
Electron Beam Lithography Optical Lithography Scanning Electron Microscopy Atomic Force Microscopy Focused Ion Beam Plasma Etching Plasma Deposition Metallization	Sputter Deposition Optical Coating Chemical Vapor Deposition Rapid Thermal Processing Film Thickness Measurement Wire Bonding Wafer Dicing Diffusion/Oxidation/Anneal

How many hours per week on average do you expect to be working in the cleanrooms? (enter numeric value)

For how long do you expect to need access to the cleanrooms? (enter numeric values)
Weeks	Months	Years

^*required items

Micro and Nanotechnology Laboratory  |  208 North Wright Street  |  Urbana, Illinois 61801