Micro and Nanotechnology Laboratory | U of I

Micro and Nanotechnology Laboratory

University of Illinois at Urbana-Champaign

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@uiuc.edu

Facilities

About our Facilities

BioNanotechnology Lab

Device Characterization Lab

ECE 444 Laboratory

Using Our Facilities

Access Guidelines

Building Access Procedure

Equipment Scheduling System

Rates & Applicable Charges

Facilities Use Agreement

Policies & Procedures Manual

Cleanroom Rules of Conduct

YES HMDS Vapor Prime Vacuum Oven

System Description:

The YES HMDS Vapor Prime Vacuum Oven is used for the vapor-priming of substrates with hexamethyldisilazane (HMDS), and adhesion promoter, prior to photo/e-beam resist application. The oven can be used to prime samples from piece-parts to 8" wafers.