Facilities
Highlights
Digital Instruments Dimension 3000 Atomic Force Microscope
Description:
The Digital Instruments Dimension 3000 utilizes automated atomic force microscopy (AFM) techniques to allow users to profile resists, or inspect surface topography and roughness.
For more information contact Edmond Chow (echow@uiuc.edu)
Operation procedure (.pdf file)
Introduction to AFM (~2hr) by Dr. Nicholas Geisse
Last Updated: Feb 2008
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AFM image of 40nm Au dot | |
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AFM image of 3um pitch grating |