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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@uiuc.edu

Facilities

Fusion Flood Exposure System

System Description:

The Fusion flood exposure system features Hg lamp spectrum filtered to equal 365 nm. Exposures can be set for either time or dose, with the dose calibrated for 365 nm exposure.