CONTACT US
Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801
Phone: 217-333-3097 Fax: 217-244-6375 email: mntl@uiuc.edu
Cleanroom
BioNanotechnology Lab
Device Characterization Lab
ECE 444 Laboratory
Lab Equipment
Access Guidelines
Building Access Procedure
Equipment Scheduling System
Rates & Applicable Charges
Facilities Use Agreement
Policies & Procedures Manual
Cleanroom Rules of Conduct
System Description:
The Fusion flood exposure system features Hg lamp spectrum filtered to equal 365 nm. Exposures can be set for either time or dose, with the dose calibrated for 365 nm exposure.