Facilities
Highlights
STS Mixed-Frequency Nitride PECVD System
Data Process(pdf)
Description:
The STS Mesc Multiplex PECVD is a dual frequency (13.56 MHz and 380 kHz) silicon nitride deposition system. Silicon nitride can be grown in either high-, low- or mixed-frequency modes in order to tailor the film stress to a particular application. . The tool is set-up to handle 4” or 6” silicon wafers, or piece-parts mounted to 4” or 6” silicon wafers or alumina sample carriers.
Manufacturer:
Surface Technology Systems plc
Imperial Park
Newport, NP10 8UJ
UK
Tel: +44 1633 652400
Fax: +44 1633 652405
ST Systems USA Inc
77A Portsmouth Avenue
Stratham, NH 03885
Tel: (603) 775 0840
Fax: (603) 775 0441