Micro and Nanotechnology Laboratory | U of I

Micro and Nanotechnology Laboratory

University of Illinois at Urbana-Champaign

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@uiuc.edu

Facilities

About our Facilities

BioNanotechnology Lab

Device Characterization Lab

ECE 444 Laboratory

Using Our Facilities

Access Guidelines

Building Access Procedure

Equipment Scheduling System

Rates & Applicable Charges

Facilities Use Agreement

Policies & Procedures Manual

Cleanroom Rules of Conduct

Seminar Room/Atrium Reservation Request

PlasmaTherm Oxygen Reactive Ion Etcher

Description:

The PlasmaTherm (“Blue”) RIE has O2 and R14 (CF4) available and is used for removal of polymers.