Facilities
Highlights
Our Facilities
The Micro and Nanotechnology Laboratory (MNTL) is a state-of-the-art multidisciplinary research facility in the College of Engineering at the University of Illinois at Urbana-Champaign. In January 2007, a $20 million expansion of the building was completed, providing a net total of 117,000 square feet of office and laboratory space, including 8,000 square feet of Class 100 and Class 1000 clean rooms and a new 2500 square-foot laboratory complex specifically designed for bionanotechnology.
The MNTL includes special facilities for (1) growth of artificially structured semiconductor materials, including Molecular Beam Epitaxy (MBE), Chemical Beam Epitaxy (CBE), and Metal-Organic Chemical Vapor Deposition (MOCVD), (2) fabrication of submicron silicon and compound semiconductor electronic and optoelectronic devices, such as MOSFETs, MESFETs, HBTs, MEMS, semiconductor lasers, waveguides, and modulators, utilizing electron beam and optical lithography, plasma-enhanced deposition of oxides and nitrides, sputter deposition, thermal and electron-beam metallization, and reactive ion etching, and (3) ultrahigh-speed optical and electrical measurements and characterization of semiconductor materials. Faculty and students also have access to extensive computing resources.