Tool Use Notification Form

First Name
Last Name
MNTL User ID #  
Advisor's Name  
"Buddy's" Name*  

*An entry in this field is required if you will be working in the cleanroom labs off-hours. The normal hours of operation are 8am to 5pm, Monday through Friday. The person designated as "buddy" must be in the cleanroom labs with you for the duration of your process. For more information, refer to the "Buddy System" guidelines in the MNTL Handbook. Please enter n/a (not applicable) if you will be using the tool only during normal hours.

Lab 216

PlasmaTherm ICP RIE PlasmaLab RIE STS Nitride PECVD STS Advanced Silicon Etcher
Silicon Tetrachloride (SiCl4) Silicon Tetrachloride (SiCl4) Silane (SiH4) Sulfer Hexaflouride (SF6)
Boron Trichloride (BCl3) Chlorine (Cl2) Ammonia (NH3) Octaflourocyclobutane (C4F8)
Chlorine (Cl2) Sulfer Hexaflouride (SF6) Oxygen (O2) Oxygen (O2)
Hydrogen (H2) Hydrogen (H2) Freon 14 (CF4)  
Oxygen(O2) Methane (CH4)    
Sulfer Hexaflouride (SF6) Oxygen (O2)    
Freon 23 (CHF3) Freon 14 (CF4)    

Lab 232

ASM LPCVD PlasmaLab Oxide PECVD
Silane (SiH4) Silane (SiH4)
Dichlorosilane (SiH2Cl2) Nitrous Oxide (N2O)
Ammonia (NH3) Freon 14 / Oxygen (CF4/O2)
Oxygen (O2)  

 

 

Lab 220 Lab 222 Lab 218 Lab 228  
Thomas Swan MOCVD Nanotaxy MOCVD MBE CBE  
TriMethylGallium  (Ga(CH3)3) TriMethylGallium  (Ga(CH3)3) Chlorine (Cl2) Arsine (ArH3)  
TriMethylAluminum  (Al2(CH3)6) TriMethylAluminum  (Al2(CH3)6)   Phosphine (PH3)  
DiEthylZinc  (Zn(C2H5)2) DiEthylZinc  (Zn(C2H5)2)   Ammonia (NH3)  
Silane  (SiH4) Silane  (SiH4)    
Hydrogen (H2) Hydrogen (H2)    
  Phosphine (PH3)    

 

Hours   Minutes

                           

 

MNTL Tool Use Notification Form
Revised: 6/26/07